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Comparison of Electron Imaging Modes for Dimensional Measurements in the Scanning Electron Microscope()

Dimensional measurements from secondary electron (SE) images were compared with those from backscattered electron (BSE) and low-loss electron (LLE) images. With the commonly used 50% threshold criterion, the lines consistently appeared larger in the SE images. As the images were acquired simultaneou...

תיאור מלא

שמור ב:
מידע ביבליוגרפי
הוצא לאור ב:Microsc Microanal
Main Authors: Postek, Michael T., Vladár, András E., Villarrubia, John S., Muto, Atsushi
פורמט: Artigo
שפה:Inglês
יצא לאור: 2016
נושאים:
גישה מקוונת:https://ncbi.nlm.nih.gov/pmc/articles/PMC5113026/
https://ncbi.nlm.nih.gov/pubmed/27452278
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1017/S1431927616011430
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