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Interlaboratory Study on the Lithographically Produced Scanning Electron Microscope Magnification Standard Prototype

NIST is in the process of developing a new scanning electron microscope (SEM) magnification calibration reference standard useful at both high and low accelerating voltages. This standard will be useful for all applications to which the SEM is currently being used, but it has been specifically tailo...

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Podrobná bibliografie
Vydáno v:J Res Natl Inst Stand Technol
Hlavní autoři: Postek, Michael T., Vladar, Andras E., Jones, Samuel N., Keery, William J.
Médium: Artigo
Jazyk:Inglês
Vydáno: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1993
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC4907700/
https://ncbi.nlm.nih.gov/pubmed/28053483
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.098.033
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