Interlaboratory Study on the Lithographically Produced Scanning Electron Microscope Magnification Standard Prototype

NIST is in the process of developing a new scanning electron microscope (SEM) magnification calibration reference standard useful at both high and low accelerating voltages. This standard will be useful for all applications to which the SEM is currently being used, but it has been specifically tailo...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:J Res Natl Inst Stand Technol
Egile Nagusiak: Postek, Michael T., Vladar, Andras E., Jones, Samuel N., Keery, William J.
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1993
Gaiak:
Article
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC4907700/
https://ncbi.nlm.nih.gov/pubmed/28053483
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.098.033
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