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Interlaboratory Study on the Lithographically Produced Scanning Electron Microscope Magnification Standard Prototype

NIST is in the process of developing a new scanning electron microscope (SEM) magnification calibration reference standard useful at both high and low accelerating voltages. This standard will be useful for all applications to which the SEM is currently being used, but it has been specifically tailo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:J Res Natl Inst Stand Technol
Hauptverfasser: Postek, Michael T., Vladar, Andras E., Jones, Samuel N., Keery, William J.
Format: Artigo
Sprache:Inglês
Veröffentlicht: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1993
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4907700/
https://ncbi.nlm.nih.gov/pubmed/28053483
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.098.033
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