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Nanomanufacturing Concerns about Measurements Made in the SEM Part IV: Charging and its Mitigation
This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments especially the scanning elec...
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| Publicado no: | Proc SPIE Int Soc Opt Eng |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5486226/ https://ncbi.nlm.nih.gov/pubmed/28663664 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2186997 |
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