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Does Your SEM Really Tell the Truth?—How Would You Know? Part 4: Charging and its Mitigation
This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments, especially the scanning ele...
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| Publicado no: | Proc SPIE Int Soc Opt Eng |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5486231/ https://ncbi.nlm.nih.gov/pubmed/28663665 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2195344 |
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