載入...

Does Your SEM Really Tell the Truth?—How Would You Know? Part 4: Charging and its Mitigation

This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments, especially the scanning ele...

全面介紹

Na minha lista:
書目詳細資料
發表在:Proc SPIE Int Soc Opt Eng
Main Authors: Postek, Michael T., Vladár, András E.
格式: Artigo
語言:Inglês
出版: 2015
主題:
在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC5486231/
https://ncbi.nlm.nih.gov/pubmed/28663665
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2195344
標簽: 添加標簽
沒有標簽, 成為第一個標記此記錄!