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Does Your SEM Really Tell the Truth?—How Would You Know? Part 4: Charging and its Mitigation

This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments, especially the scanning ele...

詳細記述

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書誌詳細
出版年:Proc SPIE Int Soc Opt Eng
主要な著者: Postek, Michael T., Vladár, András E.
フォーマット: Artigo
言語:Inglês
出版事項: 2015
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC5486231/
https://ncbi.nlm.nih.gov/pubmed/28663665
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2195344
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