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Does Your SEM Really Tell the Truth?—How Would You Know? Part 4: Charging and its Mitigation

This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments, especially the scanning ele...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Proc SPIE Int Soc Opt Eng
Hauptverfasser: Postek, Michael T., Vladár, András E.
Format: Artigo
Sprache:Inglês
Veröffentlicht: 2015
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5486231/
https://ncbi.nlm.nih.gov/pubmed/28663665
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2195344
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