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Nanomanufacturing Concerns about Measurements Made in the SEM Part IV: Charging and its Mitigation

This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments especially the scanning elec...

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Vydáno v:Proc SPIE Int Soc Opt Eng
Hlavní autoři: Postek, Michael T., Vladár, András E.
Médium: Artigo
Jazyk:Inglês
Vydáno: 2015
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5486226/
https://ncbi.nlm.nih.gov/pubmed/28663664
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/12.2186997
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