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Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell
A review is presented of kinetic-energy distribution measurements for ions striking grounded surfaces in a Gaseous Electronics Conference (GEC) rf Reference Cell. Two experimental arrangements that have been used to measure ion energies in the GEC Cell are described, and a comparison of their perfor...
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| Publicado en: | J Res Natl Inst Stand Technol |
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| Autores principales: | , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1995
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4887239/ https://ncbi.nlm.nih.gov/pubmed/29151749 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.100.029 |
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