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Dusty Plasma Studies in the Gaseous Electronics Conference Reference Cell

Particle “dust” in processing plasmas is of critical concern to the semiconductor industry because of the threat particles pose to device yield. A number of important investigations into the formation, growth, charging, transport and consequences of particulate dust in plasmas have been made using t...

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Detalhes bibliográficos
Publicado no:J Res Natl Inst Stand Technol
Main Authors: Anderson, H. M., Radovanov, S. B.
Formato: Artigo
Idioma:Inglês
Publicado em: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4887230/
https://ncbi.nlm.nih.gov/pubmed/29151754
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.100.034
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