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An Inductively Coupled Plasma Source for the Gaseous Electronics Conference RF Reference Cell

In order to extend the operating range of the GEC RF Reference Cell, we developed an inductively coupled plasma source that replaced the standard parallel-plate upper-electrode assembly. Voltage and current probes, Langmuir probes, and an 80 GHz interferometer provided information on plasmas formed...

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Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:J Res Natl Inst Stand Technol
Prif Awduron: Miller, Paul A., Hebner, Gregory A., Greenberg, Kenneth E., Pochan, Paul D., Aragon, Ben P.
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Pynciau:
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC4887237/
https://ncbi.nlm.nih.gov/pubmed/29151752
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.100.032
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