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Optical Emission Spectroscopy on the Gaseous Electronics Conference RF Reference Cell
A summary of the experimental observations of the optical emission from the Gaseous Electronics Conference (GEC) rf Reference Cell plasma will be discussed. Spatially and temporally resolved results are provided for various reference and non-reference conditions, including etching type plasmas. Thes...
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| Publicado no: | J Res Natl Inst Stand Technol |
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| Autor principal: | |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1995
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4887241/ https://ncbi.nlm.nih.gov/pubmed/29151747 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.100.027 |
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