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Langmuir Probe Measurements in the Gaseous Electronics Conference RF Reference Cell
The use of a Langmuir probe system in two GEC cells is reviewed. The major problems associated with probe diagnostics in a GEC cell are outlined and discussed. While the data base is still insufficient to give definitive values for many parameters, a number of standard measurements are put forward....
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| Veröffentlicht in: | J Res Natl Inst Stand Technol |
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| 1. Verfasser: | |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1995
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4887235/ https://ncbi.nlm.nih.gov/pubmed/29151751 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.100.031 |
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