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Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell

A review is presented of kinetic-energy distribution measurements for ions striking grounded surfaces in a Gaseous Electronics Conference (GEC) rf Reference Cell. Two experimental arrangements that have been used to measure ion energies in the GEC Cell are described, and a comparison of their perfor...

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Podrobná bibliografie
Vydáno v:J Res Natl Inst Stand Technol
Hlavní autoři: Olthoff, J. K., Van Brunt, R. J., Radovanov, S. B.
Médium: Artigo
Jazyk:Inglês
Vydáno: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC4887239/
https://ncbi.nlm.nih.gov/pubmed/29151749
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.100.029
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