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High-bandwidth multimode self-sensing in bimodal atomic force microscopy

Using standard microelectromechanical system (MEMS) processes to coat a microcantilever with a piezoelectric layer results in a versatile transducer with inherent self-sensing capabilities. For applications in multifrequency atomic force microscopy (MF-AFM), we illustrate that a single piezoelectric...

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Detalhes bibliográficos
Publicado no:Beilstein J Nanotechnol
Main Authors: Ruppert, Michael G, Moheimani, S O Reza
Formato: Artigo
Idioma:Inglês
Publicado em: Beilstein-Institut 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4778537/
https://ncbi.nlm.nih.gov/pubmed/26977385
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.7.26
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