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Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of in...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:Sensors (Basel)
Egile Nagusiak: Fong, Chien-Fu, Dai, Ching-Liang, Wu, Chyan-Chyi
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: MDPI 2015
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC4634389/
https://ncbi.nlm.nih.gov/pubmed/26512671
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s151027047
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