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Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process
In this study, we fabricated a wireless micro FET (field effect transistor) pressure sensor based on the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The wireless micro pressure sensor is composed of a FET pressure sensor, an oscillator, an amplifier and an a...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3260611/ https://ncbi.nlm.nih.gov/pubmed/22291534 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s91108748 |
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