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Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is...

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Библиографические подробности
Главные авторы: Tseng, Jian-Zhi, Wu, Chyan-Chyi, Dai, Ching-Liang
Формат: Artigo
Язык:Inglês
Опубликовано: MDPI 2014
Предметы:
Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC4029674/
https://ncbi.nlm.nih.gov/pubmed/24732100
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140406722
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