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Self-Calibrated Humidity Sensor in CMOS without Post-Processing
A 1.1 µW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Interv...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2011-12-01
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| Colecção: | Sensors |
| Assuntos: | |
| Acesso em linha: | http://www.mdpi.com/1424-8220/12/1/226/ |
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