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Self-Calibrated Humidity Sensor in CMOS without Post-Processing
A 1.1 μW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Interv...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3279210/ https://ncbi.nlm.nih.gov/pubmed/22368466 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s120100226 |
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