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Fabrication and Characterization of a CMOS-MEMS Humidity Sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensi...
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| 出版年: | Sensors (Basel) |
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| 主要な著者: | , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2015
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4541900/ https://ncbi.nlm.nih.gov/pubmed/26184204 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150716674 |
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