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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...
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| Publicado no: | Nanoscale Res Lett |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7838232/ https://ncbi.nlm.nih.gov/pubmed/33496852 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-021-03481-7 |
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