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Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process
Micro magnetic field (MMF) sensors developed employing complementary metal oxide semiconductor (CMOS) technology are investigated. The MMF sensors, which are a three-axis sensing type, include a magnetotransistor and four Hall elements. The magnetotransistor is utilized to detect the magnetic field...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187693/ https://ncbi.nlm.nih.gov/pubmed/30424326 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9080393 |
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