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An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process
This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilico...
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| Main Authors: | , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI
2014
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4168457/ https://ncbi.nlm.nih.gov/pubmed/25036331 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140712735 |
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