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An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process

This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilico...

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Bibliografiska uppgifter
Huvudupphovsmän: Yang, Ming-Zhi, Dai, Ching-Liang, Shih, Po-Jen
Materialtyp: Artigo
Språk:Inglês
Publicerad: MDPI 2014
Ämnen:
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC4168457/
https://ncbi.nlm.nih.gov/pubmed/25036331
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140712735
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