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Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor i...

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Vydáno v:Sensors (Basel)
Hlavní autoři: Dennis, John Ojur, Ahmad, Farooq, Khir, M. Haris Bin Md, Hamid, Nor Hisham Bin
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2015
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC4570319/
https://ncbi.nlm.nih.gov/pubmed/26225972
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150818256
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