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Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor i...

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Bibliographic Details
Published in:Sensors (Basel)
Main Authors: Dennis, John Ojur, Ahmad, Farooq, Khir, M. Haris Bin Md, Hamid, Nor Hisham Bin
Format: Artigo
Language:Inglês
Published: MDPI 2015
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC4570319/
https://ncbi.nlm.nih.gov/pubmed/26225972
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150818256
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