Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic f...

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Vydáno v:Sensors (Basel)
Hlavní autoři: Herrera-May, Agustín Leobardo, Soler-Balcazar, Juan Carlos, Vázquez-Leal, Héctor, Martínez-Castillo, Jaime, Vigueras-Zuñiga, Marco Osvaldo, Aguilera-Cortés, Luz Antonio
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2016
Témata:
Review
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5038637/
https://ncbi.nlm.nih.gov/pubmed/27563912
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16091359
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