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Optical properties and bandgap evolution of ALD HfSiO(x) films

Hafnium silicate films with pure HfO(2) and SiO(2) samples as references were fabricated by atomic layer deposition (ALD) in this work. The optical properties of the films as a function of the film composition were measured by vacuum ultraviolet (VUV) ellipsometer in the energy range of 0.6 to 8.5 e...

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Podrobná bibliografie
Vydáno v:Nanoscale Res Lett
Hlavní autoři: Yang, Wen, Fronk, Michael, Geng, Yang, Chen, Lin, Sun, Qing-Qing, Gordan, Ovidiu D, zhou, Peng, Zahn, Dietrich RT, Zhang, David Wei
Médium: Artigo
Jazyk:Inglês
Vydáno: Springer US 2015
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC4385042/
https://ncbi.nlm.nih.gov/pubmed/25852329
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-014-0724-z
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