लोड हो रहा है...
Structural and optical characterization of pure Si-rich nitride thin films
The specific dependence of the Si content on the structural and optical properties of O- and H-free Si-rich nitride (SiN(x>1.33)) thin films deposited by magnetron sputtering is investigated. A semiempirical relation between the composition and the refractive index was found. In the absence of Si...
में बचाया:
| मुख्य लेखकों: | , , , , , |
|---|---|
| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
Springer
2013
|
| विषय: | |
| ऑनलाइन पहुंच: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3563568/ https://ncbi.nlm.nih.gov/pubmed/23324447 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-31 |
| टैग : |
टैग जोड़ें
कोई टैग नहीं, इस रिकॉर्ड को टैग करने वाले पहले व्यक्ति बनें!
|