A carregar...
Structural and optical characterization of pure Si-rich nitride thin films
The specific dependence of the Si content on the structural and optical properties of O- and H-free Si-rich nitride (SiN(x>1.33)) thin films deposited by magnetron sputtering is investigated. A semiempirical relation between the composition and the refractive index was found. In the absence of Si...
Na minha lista:
| Main Authors: | , , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2013
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3563568/ https://ncbi.nlm.nih.gov/pubmed/23324447 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-31 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|