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Effect of the Nd content on the structural and photoluminescence properties of silicon-rich silicon dioxide thin films

In this article, the microstructure and photoluminescence (PL) properties of Nd-doped silicon-rich silicon oxide (SRSO) are reported as a function of the annealing temperature and the Nd concentration. The thin films, which were grown on Si substrates by reactive magnetron co-sputtering, contain the...

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Detalhes bibliográficos
Main Authors: Debieu, Olivier, Cardin, Julien, Portier, Xavier, Gourbilleau, Fabrice
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3211213/
https://ncbi.nlm.nih.gov/pubmed/21711673
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-161
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