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Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide

ABSTRACT: Silicon nanocrystals embedded in a silicon oxide matrix were deposited by radio frequency reactive magnetron sputtering. By means of Raman spectroscopy, we have found that a compressive stress is exerted on the silicon nanocrystal cores. The stress varies as a function of silicon concentra...

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Hlavní autoři: Zatryb, Grzegorz, Podhorodecki, Artur, Misiewicz, Jan, Cardin, Julien, Gourbilleau, Fabrice
Médium: Artigo
Jazyk:Inglês
Vydáno: Springer 2013
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On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3605160/
https://ncbi.nlm.nih.gov/pubmed/23336352
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-40
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