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Morphological, compositional, structural, and optical properties of Si-nc embedded in SiO(x) films
Structural, compositional, morphological, and optical properties of silicon nanocrystal (Si-nc) embedded in a matrix of non-stoichiometric silicon oxide (SiO(x)) films were studied. SiO(x) films were prepared by hot filament chemical vapor deposition technique in the 900 to 1,400°C range. Different...
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| Main Authors: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3606402/ https://ncbi.nlm.nih.gov/pubmed/23110990 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-604 |
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