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Thin films with high surface roughness: thickness and dielectric function analysis using spectroscopic ellipsometry

An optical surface roughness model is presented, which allows a reliable determination of the dielectric function of thin films with high surface roughnesses of more than 10 nm peak to valley distance by means of spectroscopic ellipsometry. Starting from histogram evaluation of atomic force microsco...

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Autors principals: Lehmann, Daniel, Seidel, Falko, Zahn, Dietrich RT
Format: Artigo
Idioma:Inglês
Publicat: Springer International Publishing 2014
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC3929596/
https://ncbi.nlm.nih.gov/pubmed/24570853
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/2193-1801-3-82
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