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Thin films with high surface roughness: thickness and dielectric function analysis using spectroscopic ellipsometry

An optical surface roughness model is presented, which allows a reliable determination of the dielectric function of thin films with high surface roughnesses of more than 10 nm peak to valley distance by means of spectroscopic ellipsometry. Starting from histogram evaluation of atomic force microsco...

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Détails bibliographiques
Auteurs principaux: Lehmann, Daniel, Seidel, Falko, Zahn, Dietrich RT
Format: Artigo
Langue:Inglês
Publié: Springer International Publishing 2014
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC3929596/
https://ncbi.nlm.nih.gov/pubmed/24570853
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/2193-1801-3-82
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