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Thin films with high surface roughness: thickness and dielectric function analysis using spectroscopic ellipsometry

An optical surface roughness model is presented, which allows a reliable determination of the dielectric function of thin films with high surface roughnesses of more than 10 nm peak to valley distance by means of spectroscopic ellipsometry. Starting from histogram evaluation of atomic force microsco...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lehmann, Daniel, Seidel, Falko, Zahn, Dietrich RT
Format: Artigo
Sprache:Inglês
Veröffentlicht: Springer International Publishing 2014
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3929596/
https://ncbi.nlm.nih.gov/pubmed/24570853
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/2193-1801-3-82
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