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Manufacture of Radio Frequency Micromachined Switches with Annealing
The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor...
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| Main Authors: | , |
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| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Molecular Diversity Preservation International (MDPI)
2014
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3926632/ https://ncbi.nlm.nih.gov/pubmed/24445415 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140101680 |
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