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Manufacture of Radio Frequency Micromachined Switches with Annealing
The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor...
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| Auteurs principaux: | , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Molecular Diversity Preservation International (MDPI)
2014
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3926632/ https://ncbi.nlm.nih.gov/pubmed/24445415 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140101680 |
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