טוען...
Manufacture of Radio Frequency Micromachined Switches with Annealing
The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor...
שמור ב:
| Main Authors: | , |
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| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
Molecular Diversity Preservation International (MDPI)
2014
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| נושאים: | |
| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3926632/ https://ncbi.nlm.nih.gov/pubmed/24445415 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140101680 |
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