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Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry

Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe...

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Autori principali: Kurhekar, Anil Sudhakar, Apte, P. R.
Natura: Artigo
Lingua:Inglês
Pubblicazione: 2012
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC3790309/
https://ncbi.nlm.nih.gov/pubmed/24098867
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