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Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry
Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3790309/ https://ncbi.nlm.nih.gov/pubmed/24098867 |
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