Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry

A hybrid atomic force microscopic (AFM) measurement system combined with white light scanning interferometry for micro/nanometer dimensional measurement is developed. The system is based on a high precision large-range positioning platform with nanometer accuracy on which a white light scanning inte...

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Main Authors: Guo, Tong, Wang, Siming, Dorantes-Gonzalez, Dante J., Chen, Jinping, Fu, Xing, Hu, Xiaotang
Format: Artigo
Sprog:Inglês
Udgivet: Molecular Diversity Preservation International (MDPI) 2011
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3279207/
https://ncbi.nlm.nih.gov/pubmed/22368463
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s120100175
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