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Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry
A hybrid atomic force microscopic (AFM) measurement system combined with white light scanning interferometry for micro/nanometer dimensional measurement is developed. The system is based on a high precision large-range positioning platform with nanometer accuracy on which a white light scanning inte...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3279207/ https://ncbi.nlm.nih.gov/pubmed/22368463 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s120100175 |
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