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Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry
Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essent...
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| Udgivet i: | Sensors (Basel) |
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| Main Authors: | , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2021
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8038277/ https://ncbi.nlm.nih.gov/pubmed/33918507 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21072486 |
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