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Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essent...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Behrends, Gert, Stöbener, Dirk, Fischer, Andreas
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8038277/
https://ncbi.nlm.nih.gov/pubmed/33918507
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21072486
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