ロード中...
Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices
Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity...
保存先:
| 主要な著者: | , , |
|---|---|
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Molecular Diversity Preservation International (MDPI)
2007
|
| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3785698/ |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|