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Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Micromachines (Basel) |
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| Κύριοι συγγραφείς: | , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI
2016
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190338/ https://ncbi.nlm.nih.gov/pubmed/30407442 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7040069 |
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