Impact of Parameter Variation in Fabrication of Nanostructure by Atomic Force Microscopy Nanolithography

In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (10(15) cm(−3)) p-type silicon-on-insulator by atomic force microscope nanolithography technique. The local anodic oxidation followed by two wet etching steps, potassium hydroxide etching for silicon r...

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Main Authors: Dehzangi, Arash, Larki, Farhad, Hutagalung, Sabar D., Goodarz Naseri, Mahmood, Majlis, Burhanuddin Y., Navasery, Manizheh, Hamid, Norihan Abdul, Noor, Mimiwaty Mohd
Format: Artigo
Jezik:Inglês
Izdano: Public Library of Science 2013
Teme:
Research Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC3679133/
https://ncbi.nlm.nih.gov/pubmed/23776479
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1371/journal.pone.0065409
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