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Nanopatterning on non-planar and fragile substrates with ice resists

Electron beam (e-beam) lithography using polymer resists is an important technology that provides the spatial resolution needed for nanodevice fabrication. But it is often desirable to pattern non-planar structures on which polymeric resists cannot be reliably applied. Furthermore, fragile substrate...

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Detalhes bibliográficos
Main Authors: Han, Anpan, Kuan, Aaron, Golovchenko, Jene, Branton, Daniel
Formato: Artigo
Idioma:Inglês
Publicado em: 2012
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3275690/
https://ncbi.nlm.nih.gov/pubmed/22229744
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl204198w
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