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Ice Lithography for Nano-Devices

We report the successful application of a new approach, ice lithography (IL), to fabricate nanoscale devices. The entire IL process takes place inside a modified scanning electron microscope (SEM), where a vapor-deposited film of water ice serves as a resist for e-beam lithography, greatly simplifyi...

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Autors principals: Han, Anpan, Vlassarev, Dimitar, Wang, Jenny, Golovchenko, Jene A., Branton, Daniel
Format: Artigo
Idioma:Inglês
Publicat: 2010
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC3072455/
https://ncbi.nlm.nih.gov/pubmed/21038857
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl1032815
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