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NANOMETER PATTERNING WITH ICE
Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
2005
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC1432218/ https://ncbi.nlm.nih.gov/pubmed/15943460 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl050405n |
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