An ice lithography instrument

We describe the design of an instrument that can fully implement a new nanopatterning method called ice lithography, where ice is used as the resist. Water vapor is introduced into a scanning electron microscope (SEM) vacuum chamber above a sample cooled down to 110 K. The vapor condenses, covering...

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Bibliographic Details
Main Authors: Han, Anpan, Chervinsky, John, Branton, Daniel, Golovchenko, J. A.
Format: Artigo
Language:Inglês
Published: American Institute of Physics 2011
Subjects:
General Instruments
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC3144963/
https://ncbi.nlm.nih.gov/pubmed/21721733
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3601005
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