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Ice-assisted electron beam lithography of graphene
We demonstrate that a low energy focused electron beam can locally pattern graphene coated with a thin ice layer. The irradiated ice plays a crucial role in the process by providing activated species that locally remove graphene from a silicon dioxide substrate. After patterning the graphene, the ic...
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| Главные авторы: | , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
2012
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| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3350975/ https://ncbi.nlm.nih.gov/pubmed/22498712 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0957-4484/23/18/185302 |
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